Delphi's family of sensors and integrated circuits (ICs) provides customers the advantage of innovative product technology. The Low-g Accelerometer is an all-silicon linear accelerometer. The single crystal silicon IC provides a rugged, accurate sensor that is being developed for automotive, industrial, and consumer applications. The sensor module integrates a low-cost sensor with a compensating IC into a small outline package. The capacitive sensing element is manufactured using Delphi’s Micro Electro Mechanical (MEMS) technology, while the signal conditioning IC is fabricated using Delphi’s high-voltage Complementary Metal Oxide Semiconductor (CMOS) process.
The Low-g accelerometer operates using a 5V supply. Applied acceleration causes deflection of the internal proofmass. The position of the proofmass is capacitively detected by the compensator IC and converted to a DC output voltage. It can also be set to perform a self test, which simulates actual acceleration.
Benefits
Features
Possible Applications
Module Performance Data
| Supply Voltage | 5.0 V ± 5% |
| Temperature Range | -40°C to 125°C |
| Supply Current | 7.00mA Max w/ 100kΩ load |
| Zero g Offset | 2.5V ± 50mV Max., Ratiometric to Supply |
| Offset Drift | ± 150mV Max. for /- 1.5g Range Calibration |
| Sensing Range | ± 0.75g to ± 3.0g Calibrated Range, Ratiometric to Supply |
| Sensitivity Error | ± 3% Max. |
| Output Load Current | ±1mA Max. |
| Frequency Response | DC to 250 Hz or 1500 Hz Selectable |
| Noise | 0.25mg/(sq. rt. Hz) Max |
| Startup Time | 25ms |
| Self-Test | Bi-directional |
| Linear Output Range | 0.7V to 4.3V |
| Lower Diagnostic Range | <0.2V (Fault detection output) |
| Upper Diagnostic Range | >4.8V (with 5V Supply) |
| Cross-Axis Sensitivity | <5% |
| Shock Resistance | 10,000 g's Max with no reduced performance |