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Microelectronics

Accelerometers

Delphi Dual Axis Accelerometer

Delphi's family of sensors and integrated circuits (ICs) provides customers the advantage of innovative product technology. The Dual Axis Accelerometer is an all-silicon linear accelerometer. The single crystal silicon IC provides a rugged, accurate sensor that is being developed for automotive, industrial, and consumer applications. The sensor module integrates a low-cost sensor with a compensating IC into a small outline package. The capacitive sensing element is manufactured using Delphi's Micro Electro Mechanical (MEMS) technology, while the signal conditioning IC is fabricated using Delphi’s high-voltage Complementary Metal Oxide Semiconductor (CMOS) process.

The all-silicon Dual Axis Accelerometer operates using a 5V supply. Applied acceleration causes movement of the internal proofmass. The position of the proofmass is capacitively detected by the compensator IC and converted to a DC output voltage. The accelerometer can also perform a self test, which simulates actual acceleration.

Benefits

  • Bi-directional self test
  • Range tailored to customer needs
  • Custom cost-effective solutions
  • Low offset error
  • Small package size

Features

  • Programmable ranges from +/- 2.5 g to +/- 50 g
  • Start up time < 25 msec
  • Output ratiometric to supply
  • Single crystal silicon element
  • Capacitive sensing
  • Low noise
  • Analog output

Possible Applications

  • Vehicle stability control
  • Vehicle rollover detection
  • Vehicle crash detection
  • Vehicle dynamics (lateral or longitudinal)
  • Virtual reality electronics
  • Consumer electronics
  • Industrial controls
  • Robotics

Module Performance Data
Supply Voltage 5.0 V +/- 5%
Temperature Range -40o C to 125o C
Supply Current 7.00 mA Max. w/100 kΩ load
Zero g Offset 2.5 V +/-50m V Max., Ratiometric to Supply
Offset Drift +/-150 mV Max. for +/-15 g Range Calibration
Sensing Range +/-2.5 g to +/50 g Calibrated Range, Ratiometric to Supply
Sensitivity Error +/- 3% Max.
Output Load Current +/-1 mA Max.
Frequency Response 400 Hz or 1500 Hz Selectable
Noise 10 mV rms Max
Startup Time 25 ms
Self-Test Bi-directional
Linear Output Range 0.7 V to 4.3 V
Lower Diganostic Range < 0.15 V (Fault detection output)
Upper Diganostic Range > 4.85 V (with 5 V Supply)
Cross-Axis Sensitivity <5%
Shock Resistance 10,000 g's Max with no reduced performance

Dual Axis Accelerometer